Design and Fabrication of Diffractive Optical Elements by Using Semiconductor Processing Technology

碩士 === 國立臺灣大學 === 應用力學研究所 === 85 === Blazed gratings are one of the most significant technology of diffractive optical elements (DOEs). They are widely adopted in various opto-electro-mechanical systems. This dissertation analyzed blazed...

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Bibliographic Details
Main Authors: Ting, Jau Ting, 鄧兆庭
Other Authors: C. K. LEE
Format: Others
Language:zh-TW
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/52750510464775111472