Monitoring of A Furnace Workcell

• Main Authors: Lin, Sheng-Ya, 林聖雅
• Other Authors: Huang Han-Pan
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/03244314049257410254

碩士 === 國立臺灣大學 === 機械工程學系 === 85 === In the IC manufacturing, the wafer processing takes much time in furnaces than other equipment. How to efficiently integrate furnaces with other automation machines are important. The thesis aims to model and monitor a furnace workcell.The CTPN (Colored Timed Petri Net) is used to model the furnace. Based on CTPN, the dynamic behaviors of the furnace, such as loading, processing, unloading and wafer count mismatching, can be emulated the CTPN model is hierarchical and modular. The hierarchical architecture is built by dividing the behaviors of the furnace to make the model more compact and the modular modeling make the model flexible and easy use.In addition to modeling and analysis, the monitoring of the furnace system is designed and accomplished. The furnace emulator provides a quasi environment for upper level system testing. In addition, it facilitates the design of the group controller without using true equipment. Finally, the workcell concept is merged into the furnace system.