Monitoring of A Furnace Workcell
碩士 === 國立臺灣大學 === 機械工程學系 === 85 === In the IC manufacturing, the wafer processing takes much time in furnaces than other equipment. How to efficiently integrate furnaces with other automation machines are important. The thesis aims to model...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03244314049257410254 |