The Study of Fluorine-Incorporated Oxidation Process and Breakdown Characteristics of Ultra-Thin Gate Oxides
碩士 === 國立臺灣大學 === 電機工程學系 === 85 === In this thesis, the ultrathin fluorinated gate oxides prepared by liquidphase(LPD) first and then followed by furnace oxidation(LPD/FO) or rapid thermaloxidation(LPD/RTO) are characterized. By taking...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21029279563343143668 |