Magentic Properties and Microstructure of Fe-Co-N Thin Films Prepared by RF Magnetron Sputtering

碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 85 === ABSTERACT (Fe90Co10)100-x Nx ;(x=0~40) thin films were prepared by reactive RF magnetron sputtering. The flow rate ratio of nitrogen (N2/Ar+N2) in the system was controlled at 0~15...

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Bibliographic Details
Main Authors: Chang, Si-Shine, 張仕祥
Other Authors: P.C. Kuo
Format: Others
Language:zh-TW
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/97320168706624880961