The Study of TiN, (Ti,Al)N coatings prepared by Un-balanced Magnetron Sputtering
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 85 === The TiN and (Ti,Al)N coatings prepared by un-balanced magnetron sputtering are studied in this paper. When the substrate bias is lower than 80V, TiN coating can be thickened, and its surface roughness can be reduce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98619042902895252332 |