Performance Evaluation of Semiconductor Manufacturing Systems Using Stochastic Petri Nets
碩士 === 國立海洋大學 === 電機工程學系 === 85 === This thesis contains two parts: the performance evaluation of semiconductor manufacturing systems and the performance evaluation of the prioritized processes with shared resources. We use a hybrid method...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92972343835098874708 |