Chemical Vapor Deposition of ZnSe on Si Substrate Using IR Furnace For Heterojunction Devices
碩士 === 國立海洋大學 === 電機工程學系 === 85 === In this study, the ZnSe epilayers are grown on Si substrate by using IR CVD and two-step growth method. From the XRD, SEM, SIMS and PL measurements, it shows that the optimum growth condit...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89785585522098265199 |