Epitaxial Growth and Thermal Stability of CoSi2 on (001)Si Substrate with an Interposing Mo Layer
碩士 === 國立清華大學 === 材料科學工程學系 === 85 === Effects of a thin interposing Mo layer on the formation and growth of epitaxial CoSi2 on (001)Si have been investigated by x-ray diffraction, transmission electron microscopy and sheet resistance measurement. A thin interposing Mo interlayer was found to b...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91065514195584366644 |