Fabrication of Micro-Machined Micro-Cavity with Ta2O5/Au Mirros on Si Substrate

• Main Authors: Huang, Yun-San, 黃允聖
• Other Authors: 朱安國
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/92159466515680133071

碩士 === 國立中山大學 === 光電工程研究所 === 85 === A novel optical micro-cavity is presented and theoretically analyzed. The micro-cavity is fabricated using micro-machined technology on the Si substrate. High energy band gap material (Ta2O5) is used for the mirrors of the micro-cavity. In addition, a thin layer of gold is deposition on top of the Ta2O5, layer to increase the reflectivity of the mirrors. The cavity length of the micro-cavity can be adjusted by applying a voltage between the Ta2O5 mirrors. According to our calculations, the transmission bandwidth is 9nm, and Finesse is 18 for the micro-cavity at a center wavelength of 1.2μm. If the length of the resonant cavity is changed from 2μm to 1.8μm, the transmission peak can drift 73nm.