Fabrication of Micro-Machined Micro-Cavity with Ta2O5/Au Mirros on Si Substrate
碩士 === 國立中山大學 === 光電工程研究所 === 85 === A novel optical micro-cavity is presented and theoretically analyzed. The micro-cavity is fabricated using micro-machined technology on the Si substrate. High energy band gap material (Ta2O5) is used for the mirrors of the micro-cavity. In addition, a thi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92159466515680133071 |