To promote the solar cell efficiency by applied the technic to deposition the TCO films at room temperature
碩士 === 國立中央大學 === 光電(科學)研究所 === 85 === Conducting transparent films of tin oxide and amorphous silicon films were deposited by radio frequency plasmas enhanced chemical vapor deposition method. The main goal is to promote the solar cell effici...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1997
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Online Access: | http://ndltd.ncl.edu.tw/handle/37362716247849758181 |