Laterally Comb-Drive Micro-Vibrator
碩士 === 國立交通大學 === 電子工程學系 === 85 === A laterally comb-drive vibrator with twenty fingers and comb gap, folded-beam length being 2um, 200um is studied in this thesis. Comb vibrator structureis fabricated from 2um-thick phosphorus-doped lo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33736767007719938818 |