Study of temperature sensing system of rapid thermal processing
碩士 === 國立交通大學 === 控制工程系 === 85 === In this thesis, we surveyed the temperature sensing system of rapid thermalprocessing(RTP). The main problems of RTP are the uniformity and repeatability of wafer temperaturein the process of manufacturing. In order to o...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/37389185359341669066 |