Generalized Real-Time Simulator of Rapid Thermal Processing Module
碩士 === 國立交通大學 === 控制工程系 === 85 === Instead of traditionally off-line evaluation applied mainly on analysis, we propose a real-time dynamic simulator for rapid thermal processing (RTP) systemin semiconductor manufacturing. First, we introd...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11109900540025229377 |