The System Simulation and Temparature Controller Design of a Rapid-Thermal-Process Furnace
碩士 === 國立交通大學 === 控制工程系 === 85 === It has been known that Rapid Thermal Processing(RTS)is a kind of rapid temperature-control process.In the recent years,the manufacture technology ofsemiconductor products has been improved greatly.The manufacturers tend...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59854821724103442922 |