The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model

碩士 === 國立交通大學 === 工業工程與管理學系 === 85 === In integrated circuit (IC) manufacturing, a wafer''s defects tend to cluster. As the wafer size increases, the clustering phenomenon of the defects becomes increasingly apparent.When the conventional Poisso...

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Main Authors:	Chao, Lee-Chang, 趙豊昌
Other Authors:	Lee-Ing Tong, Wei-I Lee
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/46233153779168204597

id	ndltd-TW-085NCTU0031014
record_format	oai_dc
spelling	ndltd-TW-085NCTU00310142015-10-13T17:59:37Z http://ndltd.ncl.edu.tw/handle/46233153779168204597 The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model 利用類神經網路構建之積體電路良率預估模式 Chao, Lee-Chang 趙豊昌碩士國立交通大學工業工程與管理學系 85 In integrated circuit (IC) manufacturing, a wafer''s defects tend to cluster. As the wafer size increases, the clustering phenomenon of the defects becomes increasingly apparent.When the conventional Poisson yield model is used, the clustered defects frequently cause false results. In this study, we propose a neural network-based modified Poisson yield model to predict the wafer yield in IC manufacturing. The proposed approach can reduce the phenomenon of the false predictions caused by the clustered defects. A case study is also presented, demonstrating the effectiveness of the proposed approach.Keywords: integrated circuit, defects, cluster, yield model, neural network Lee-Ing Tong, Wei-I Lee 唐麗英, 李威儀 1997 學位論文 ; thesis 2 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 工業工程與管理學系 === 85 === In integrated circuit (IC) manufacturing, a wafer''s defects tend to cluster. As the wafer size increases, the clustering phenomenon of the defects becomes increasingly apparent.When the conventional Poisson yield model is used, the clustered defects frequently cause false results. In this study, we propose a neural network-based modified Poisson yield model to predict the wafer yield in IC manufacturing. The proposed approach can reduce the phenomenon of the false predictions caused by the clustered defects. A case study is also presented, demonstrating the effectiveness of the proposed approach.Keywords: integrated circuit, defects, cluster, yield model, neural network
author2	Lee-Ing Tong, Wei-I Lee
author_facet	Lee-Ing Tong, Wei-I Lee Chao, Lee-Chang 趙豊昌
author	Chao, Lee-Chang 趙豊昌
spellingShingle	Chao, Lee-Chang 趙豊昌 The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
author_sort	Chao, Lee-Chang
title	The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
title_short	The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
title_full	The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
title_fullStr	The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
title_full_unstemmed	The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
title_sort	yield prediction model with neural network for integrated circuit --- based on poisson model
publishDate	1997
url	http://ndltd.ncl.edu.tw/handle/46233153779168204597
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The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model

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