The Yield Prediction Model with Neural Network for Integrated Circuit --- Based on Poisson Model
碩士 === 國立交通大學 === 工業工程與管理學系 === 85 === In integrated circuit (IC) manufacturing, a wafer''s defects tend to cluster. As the wafer size increases, the clustering phenomenon of the defects becomes increasingly apparent.When the conventional Poisso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46233153779168204597 |