Common Path Optical Heterodyne Profilometer
碩士 === 華梵工學院 === 機械工程學類 === 85 === ABSTRACT A new common path polarized optical heterodyne interferometer for the measurement of surface profile is described. It is based on a common path heterodyne interferometer which the signal...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72266577009433732060 |