Morphological Stabilities of Chemical Vapor Deposition Films
碩士 === 中原大學 === 機械工程學系 === 85 === In this article, we study the influence of variable thermal physical propertics on the three-dimensional morphological stability of Chemical Vapor Deposition (CVD) films under the diffusion-limited condition. First of all, we establish a set of heat-transferred...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13961592747436672580 |