| Summary: | 碩士 === 大同工學院 === 電機工程學系 === 84 === The SrTiO3 thin films grown on Si substrates by pulsed
laser deposition show good material properties, and the
cheapness of the substrate can lead to the cost reduction. In
this thesis, we evaluate the process of pulsed laser deposition
and discuss the effect of experimental parameters for
preparingSrTiO3 thin films. According to the simulation results,
we can find SrTiO3 thinfilms are good buffer layer and other
films such as PZT or BT grown on SrTiO3thin films are suitable
structure for surface acoustic wave. In addition, we find that
we can successfully grow SrTiO3 thin films on Si substrates with
strong (200) orientation and we can enlarge the ratio of
(200)intensity /(110)intensity by choosing reasonable
conditions. In summary, the purpose of using SrTiO3 thin film as
a buffer layer is fabricating other thin film on it so we can
produce SAW devices.
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