Preparation of SrTiO3 Buffer Layer by Pulsed Laser Deposition for SAW Application
碩士 === 大同工學院 === 電機工程學系 === 84 === The SrTiO3 thin films grown on Si substrates by pulsed laser deposition show good material properties, and the cheapness of the substrate can lead to the cost reduction. In this thesis, we evaluate th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98203547198144632515 |