PREPARATION OF TRIMETHYLSILYL GROUP CONTAINING MONOMER AND ITS COPOLYMERS FOR DEEP-UV RESIST
碩士 === 大同工學院 === 化學工程學系 === 84 === Three series of silicon containing copolymers werer synthesized by the solution free-radical copolymerization with azobisisobutyronitrile(AIBN) in 1,4-dioxane at 50-70 C. For study on the effects of reacti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89096900727185706066 |