Studies on Growth of Epitaxial Diamond Films
碩士 === 國立臺灣科技大學 === 化學工程研究所 === 84 === In the present thesis, the optimized conditions of growing heteroepitaxial diamond films on silicon, nickel and cobalt substrates by using the microwave plasma enhanced chemical vapor deposition are described. In the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74205791399565736250 |