Study on Bias-Sputter Deposited TiNx in Submicron Interconnects

Study on Bias-Sputter Deposited TiNx in Submicron Interconnects

碩士 === 國立清華大學 === 電機工程研究所 === 84 ===

Bibliographic Details
Main Authors:	Lin, Bi Ling, 林碧玲
Other Authors:	Hwang, Huey Liang
Format:	Others
Language:	en_US
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/91751365377574725744

Description
Summary:	碩士 === 國立清華大學 === 電機工程研究所 === 84 ===