Study on Bias-Sputter Deposited TiNx in Submicron Interconnects
碩士 === 國立清華大學 === 電機工程研究所 === 84 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/91751365377574725744 |