Wet Oxidation Behaviors of Si in the Presence of Cu3Si at Elevated Temperatures
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 === The oxidation of Si catalyzed by Cu3Si at elevated temperatures has been investigated by transmission electron microscopy, X- ray diffractometry, and Auger electron spectroscopy. The Cu films were de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89868049840841976235 |