Gas and Liquid Flows in Chemical Vapor Deposition and Spin Coating
博士 === 國立中央大學 === 機械工程學系 === 84 === Chemical vapor deposition (CVD) and spin coating are two important processes in the fabrication of semiconductor devices and integered circuits.This study, recognization that a better of these aspects of fabrication in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20108395858707674838 |