The materials growth and characterization of GaN epitaxial film

碩士 === 國立中央大學 === 物理學系 === 84 === In this thesis, we will report the growth and characterization ofGaN epitaxial materials. We have grown GaN epitaxial layer on C-facesapphire ( Al2O3 ) substrate by low- pressure metalorganic chemicalvapor deposition ( LP...

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Bibliographic Details
Main Authors: Lin, Chia-Feng, 林佳鋒
Other Authors: Gou-Chung Chi
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/58371224079424425030