The influence of O2 on the quality of DLC films deposited in a rf capacitively-coupled PECVD system

The influence of O2 on the quality of DLC films deposited in a rf capacitively-coupled PECVD system

碩士 === 國立中央大學 === 光電(科學)研究所 === 84 === The research employs rf capacitively-coupled PECVD system to grow diamond-like films (DLF). The results show thats sp3-C content is increased, the transparence is higher from UV/ Visible spectroscopy a...

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Bibliographic Details
Main Authors:	Chu Kun Chang, 張朝焜
Other Authors:	Pei Li Chen
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/24271436251954291606

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