The influence of O2 on the quality of DLC films deposited in a rf capacitively-coupled PECVD system
碩士 === 國立中央大學 === 光電(科學)研究所 === 84 === The research employs rf capacitively-coupled PECVD system to grow diamond-like films (DLF). The results show thats sp3-C content is increased, the transparence is higher from UV/ Visible spectroscopy a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24271436251954291606 |