Thermally Driven Polysilicon Actuators for Lateral Displacement
碩士 === 國立交通大學 === 機械工程研究所 === 84 === A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01015989300753086848 |