Study of the Delta-Doped InGaP/InGaAs/GaAs Pseudomorphic Modulation Doped Field-Effect Transistors

碩士 === 國立交通大學 === 電子研究所 === 84 === We have investigated the existence of electron subbands in delta-doped InGaPmaterial with Si using Subnikov-de Haas measurement at 0.6K. The Subbandenergy levels and the electron wave functions of...

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Bibliographic Details
Main Authors: Tzeng, Kuo-Chyuan, 曾國權
Other Authors: Simon Min Sze
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/93549761595148057061
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Summary:碩士 === 國立交通大學 === 電子研究所 === 84 === We have investigated the existence of electron subbands in delta-doped InGaPmaterial with Si using Subnikov-de Haas measurement at 0.6K. The Subbandenergy levels and the electron wave functions of these subbands are calculatedself- consistently by solving the Poisson and the Schrodinger eqautions.The desities of 2DEG are 1.73 x 10^12, 0.87 x 10^12, and 0.086 x 10^12 cm^-2for the 1st, 2nd, and 3rd subband, respectively. The calculated subband energylevels are -39.33, -12.31, -8.00, and -4.09 meV below the Fermi level for thecorresponding four subbands. An n-In0.49Ga0.51P/GaAs MODFET with 2 um gate length demostrates a maximumextrinsic transconductance of 74 mS/mm and a maximum intrinsic transconduc-tance of 121 mS/mm at 300K. The device has a source resistance of 53 ohms, amaximum oscillaton frequency (fmax) of 16 GHz, and a cutoff frequency (ft) of6.2 GHz. The second device is a delta-doped In0.49Ga0.51P/In0.1Ga0.9As/ GaAs MODFETwith 1.2 um gate length. It demonstrates a maximum extrinsic transconductanceof 64 mS/mm at 300K. The lower extrinsic transconductance is due to highersource resistance (95 ohms) and the lower mobility. The measured famx and ftare 13.4 GHz and 5.2 GHz, respectively. We have also employed the software, Medici, to predict the D.C. characteris-tic of the second device. The measured characteristics are reasonable agree-ment with the simulated results. It shows that Medici is a good tool to pre-dict and optimize device performance. An equivalent circuit has been obtainedusing the Touchstone program along with the measured S- parameters. From theequivalent circuit, we conclude that three are three reasons that affect theperformance of these MODFETs: (1) the transconductance is limted by large ser-ies resistance and low mobility, (2) ft is restricted by large parasitic capa-citances, and (3) fmax is poor due to lower ratios of transconductance to out-put transconductance and gate- source capacitance to drain-gate capacitance.