Fuzzy Logic Models with Adaptive Learning Rates and Genetic Algorithm for Thermally Based Microelectronic Manufacturing Processes
碩士 === 國立交通大學 === 控制工程系 === 84 === This paper presents the improved fuzzy logic models (FLM) to simulate the thermally based microelectronic manufacturing process: the silicon deposition process in a barrel chemical vapor deposition...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77342210875456884445 |