The Effect of N2 for doamond nucleation under bias condition
碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 === The effect of diamond nuclei using CH4/N2 gas source in bias enhanced nucleation (BEN) was examined by microwave plasma chemical vapor deposition. Various parameters of bias condition wi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12661981460904501120 |