Origins of Internal Stress and Optical Properties of Diamond Films
碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 === Diamond films were deposited on P-type (100) silicon substrate by a hot filament chemical vapor deposition (HFCVD) system with reactant gases of CH4 and H2. Effects of CH4/H2 ratio, deposition time, deposition temp...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50583246491883440947 |