An Automatic Imaging System for Evaluating the Particles on Microstructure Surface
碩士 === 逢甲大學 === 自動控制工程研究所 === 84 === The quality measurement on the microstructure surface of an device becomes more and more important during the process of high density fabricating factories, such as semiconductors, LCD, optical disc, and so on. But the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27176400079446184529 |