Epitaxial Lateral Overgrowth of GaAs on Si substrate
碩士 === 中原大學 === 電子工程學系 === 84 === Although there have been many investigations of the heteroepitaxial growth of GaAs on Si substrate (GaAs/Si) by seing various methods such as MOCVD and MBE till now, the epitaxial lateral overgrowth (ELO) o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96972975207104698135 |