Simulation of the Theoretical Structure of Long-term Evaluation of Flows in Integrated Circuit Fabrication
碩士 === 東海大學 === 應用數學研究所 === 83 === In this paper we develop programs for simulating " the theoretical structure of the long-term evaluation of flows in integrated circuit fabrication " to test the realiability of the theory. We also run a simple...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64358757162083727337 |