Studies on the Process and Optical Properties of the Diamond Film

碩士 === 國立臺灣科技大學 === 化學工程研究所 === 83 === This thesis describes the synthesis of the diamond thin film using microwave plasma assisted chemical vapor deposition method and their optical properties. Gas flow rate , methane/ hydrogen ratio, subs...

Full description

Bibliographic Details
Main Authors: Chen Kow Cheng, 陳國成
Other Authors: Liu Chin Hsin
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/74643055508703712821