Studies on the Process and Optical Properties of the Diamond Film
碩士 === 國立臺灣科技大學 === 化學工程研究所 === 83 === This thesis describes the synthesis of the diamond thin film using microwave plasma assisted chemical vapor deposition method and their optical properties. Gas flow rate , methane/ hydrogen ratio, subs...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/74643055508703712821 |