The study in illumination effects of electrochemical silicon etching and the fabrication of acoustic sensors
碩士 === 國立海洋大學 === 電子工程學系 === 83 === In the experiments of etching under illumination,we firstly discovered that passivative potential of n or p type Si under illumination would shift to more cathodic or anodic direction respectively.To get...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25392995275919003844 |