The Characterization of H concentration and its evolution in a- Si:H film deposited on the single-side polished Si wafers

The Characterization of H concentration and its evolution in a- Si:H film deposited on the single-side polished Si wafers

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===

Bibliographic Details
Main Authors:	Yu-Sen Chu, 朱豫森
Other Authors:	Jon-Yiew Gan
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/31101620597901609121

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