On the microstructural,optical and physical-chemical propertise of SiO and a-C:H films

On the microstructural,optical and physical-chemical propertise of SiO and a-C:H films

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===

Bibliographic Details
Main Authors:	Deng； Shiann Jer, 鄧憲哲
Other Authors:	Chou Lih Hsin
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/75422397505841391927

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