On the microstructural,optical and physical-chemical propertise of SiO and a-C:H films
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/75422397505841391927 |