Capacitive pressure sensor
碩士 === 國立交通大學 === 電子研究所 === 83 === Micro-electro-mechanical systems( MEMS ) is a large field of study, because it combines two major subjects, i.e., electronic and mechanical engineering. Fabricated by IC technologies, emp- loying diaphrag...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31274139779962345769 |