Investigation and Application of Room-Temperature Liquid- Phase Deposited Silicon Oxide (SiO2-xFx)
博士 === 國立交通大學 === 電子研究所 === 83 === In this thesis, we developed a novel technology for fluorinated silicon oxide (SiO2-xFx) by using room-temperature liquid-phase deposition method. LPD-oxide can be obtained by adding H2O to the immersing solution which w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31883591066610785258 |