The Study of The Solid State Microsensor For CO2 Using The WO3 Sputtered Thin Film

• Main Authors: Yuhterng Liou, 劉裕騰
• Other Authors: Shuchi Chao
• Format: Others
• Language: zh-TW
• Published: 1995
• Online Access: http://ndltd.ncl.edu.tw/handle/74262303234246308264

碩士 === 國立交通大學 === 電子物理學系 === 83 === The thesis represents a carbon dioxide sensitive, solid micro- sensor with solid electrolyte covered sputt- ered tungsten oxide based on platinum microelectrodes in room temperature. The micro-electroeds manufactured is inter-digitated. The solid electrolyte is made by bicar- bonate contained,gas permeable transparent poly(vinyl alcohol). The strong adhesion of the sputtered tungsten oxide on micro-electrodes favors the experimentals. The solid electrolyte will be acidified when exposed to carbon dioxide.And the electrical characteristic (resistance) of tungsten oxide will dramatically change (be lower) resuling from being reduced to HxWO3 in acid electrolyte. Such that the concentration of carbon diox- ide in the atomsphere can be monitored through the mea- surement on resistance of tungsten oxide. The sensor can sense the carbon dioxide well in room temperature:the shortest response time is about 1 minute. 94% variation on resistance is detected when sensing pure carbon diox- ide. This sensor can absolutly work in sensing carbon dioxide gas.