The Study of The Solid State Microsensor For CO2 Using The WO3 Sputtered Thin Film

碩士 === 國立交通大學 === 電子物理學系 === 83 === The thesis represents a carbon dioxide sensitive, solid micro- sensor with solid electrolyte covered sputt- ered tungsten oxide based on platinum microelectrodes in room temperature. The micro-electroeds...

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Bibliographic Details
Main Authors: Yuhterng Liou, 劉裕騰
Other Authors: Shuchi Chao
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/74262303234246308264