The Study of The Solid State Microsensor For CO2 Using The WO3 Sputtered Thin Film
碩士 === 國立交通大學 === 電子物理學系 === 83 === The thesis represents a carbon dioxide sensitive, solid micro- sensor with solid electrolyte covered sputt- ered tungsten oxide based on platinum microelectrodes in room temperature. The micro-electroeds...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/74262303234246308264 |