An Inspection System for Detecting Defects on Chip
碩士 === 國立交通大學 === 資訊科學學系 === 83 === An image inspection system for detecting defects on chip is developed. The system can automatically inspect defects of chips on wafer after operator's alignment.The system consists of three parts: 1...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79258641590958327275 |